Brooks mag 7 robot manual

BROOKS Robot Repair for Brooks MTR5, Brooks MAG7 robots and aligners - Greenspec has a very long experience of repair overhaul services for Brooks, PRI, Equip Atmospheric Robots Controllers (over ). Service starting with detailed evaluation followed by a very accurate repair with mostly OEM parts and a real life test. item 5 BROOKS MAG7 robot, WAFER TRANSFER ROBOT w/ ARM 5 -BROOKS MAG7 robot, WAFER TRANSFER ROBOT w/ ARM $11, servo with Brooks’ proprietary DSP controller minimizes vibration. The MAG 7 B’s patented BiSymmetrik arm enables wafer exchange and buffering. The PASIV™ user programmable safety zones prevent possible collision during manual operation thus insuring the safety of .

1 nozzles see page 7 see page 7 2 contact Tips see page 7 see page 7 3 diffusers/Tip holders see below see below 4 swanneck, A degree r3A - 4 swanneck, A 22 degree r3A - 22 4 swanneck, A long, x" (x50mm) 22 degree r3A - 22l 4 swanneck, A 35 degree r3A - 35 4 swanneck, A 45 degree r3A - Semigroup's Drop In Replacement for LAM, Novellus, Brooks Mag 7 Armset - Dual Armset for LAM CVD/PVD Tool, mm for Part Number Call to check availability SKU: SG Category: Robots. Eumetrys Robotics also offers to exchange your Brooks robot with a fully operational, reconditioned machine. Exchange your defective robots for robots of the same make and model that are fully reconditioned. In order to ensure the continuity of your production and return your machines to operation as quickly as possible, we guarantee that your robot will be replaced in 7 days.

servo with Brooks’ proprietary DSP controller minimizes vibration. The MAG 7 B’s patented BiSymmetrik arm enables wafer exchange and buffering. The PASIV™ user programmable safety zones prevent possible collision during manual operation thus insuring the safety of high value wafers and process equipment. Wafer Handling Systems. Brooks offers a comprehensive portfolio of configurable atmospheric and vacuum wafer handling platforms and systems. In addition, Brooks provides the ability to create flexible, cost-effective, and unique solutions to meet each customer’s specific application. Our dedicated team of experienced professionals uses a. used Brooks cluster tools, vacuum cassette elevators, MAG 7, and VTR/MTR-5 robots. Equipment Company will help drive down your costs for wafer handling. Our inventory of equipment changes constantly, so keep checking the web site! Currently offering: mm mm refurbished Brooks Automation cluster tool platforms.